마이크로 컨택 프린팅을 이용한 전극 패턴 전이를 통한 ZnO 나노로드 트랜지스터 제작

초록

One of oxide materials, ZnO was applied to Thin Film Transistor(TFT). Single crystalline ZnO nanorods were fabricated from aqueous solutions and dispersed on HfO oxide layer. To form drain and source electrode pads of botttom gate structure 2 TFT, used poly(3,4-ethylenedioxyth-iophene)- poly(styrenesulfonate)(PEDOT-PSS) as conduc- tivity polymer. Polydimethylsiloxane (PDMS) mold was used to form drain and source electrode pads which can transfer PEDOT-PSS to substrate by micro contact printing( μCP). N-type TFT was fabricated with 2 μm channel length.