Optical properties of Ta2O5 thin films by plasmaion assisted deposition(PIAD)

초록

For optical telecommunication of high index and of low index are generally used at thin film optical filters. The filter for optical telecommunication must have the optical property that the spectrum shift due to the environmental parameters such as temperature and humidity should be as small as possible. While the packing density of is universally high, that of is easily changed by the different deposition conditions such as substrate temperature, partial pressure of reactive gas, etc. Therefore it should be deposited to have higher packing density for such a better filter that is not simply affected by the environmental parameters. As the methods to fabricated the high packing density of the filters, there are Ion beam assisted deposition(IAD), Plasma ion assisted deposition(PIAD), Ion beam sputtering (IBS), and Ion beam assisted sputtering (IBAS), etc.