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Effects of the O2/Ar flow ratio and the ZrO2 film thickness on the dielectric properties of a sputter-deposited Pt/ZrO2/Si structure

  • CHONGMU LEE
제목
Effects of the O2/Ar flow ratio and the ZrO2 film thickness on the dielectric properties of a sputter-deposited Pt/ZrO2/Si structure
저자
CHONGMU LEE
학회명
The 13th International Symposium on the Physics of semiconductors and Applications-2006

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