토포그래피적으로 복잡한 웨이퍼 곡면에 대한 메쉬 생성 방법 연구

초록

For semicunductor process simulation especially for the topographycal evolution on the wafer, the calculated wafer topography should be converted to a mesh structure for FEM solution. In this paper, we report an extraction algorithm from a cellcased topography simulation by employing NURBS surface. Further, we applied surface advancing front algorithm for generating meshes in the NURBS surface.