고상결정성장법과 에어로졸 데포지션을 통한 치밀한 0.985KNN-0.015BCuN 단결정막 증착

초록

Solid-state crystal growth(SSCG) was used for fabricating single crystal of lead-free piezoelectric, 0.985(K0.5Na0.5)NbO3 - 0.015Ba(Cu1/3Nb2/3)O3(KNN-BCN). In conventional SSCG method, the pores which trapped in single crystal deteriorate piezoelectric property. To solve this problem, Aerosol deposition(AD) was fabricated on KTaO3 seed crystal substrate to form dense microstructure of KNN-BCN films. It was observed that the single crystal growth occurred at seed crystal without large pores by using AD after post annealing. Also, Transient liquid phase fabricated by Cu ion enhance single crystal growth by lowering melting temperature of it. As a result, the KNN-BCuN films fabricated by using AD and SSCG were formed with dense and less porosity microstructure. Therefore, it is assumed that aerosol deposition method may be capable of improving porosity problem of SSCG.