Improvement of mechanical properties according to phase transformation of Cu coating layer functionalized with high energy beam

  • Park, Suyoung
  • Kim, Sangwoo
  • Na, Han Gil
  • Choi, Myung Sik
  • Byoun, Youngmin
  • 외 1명
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초록

After the Cu coating layer was fabricated, the high energy beam was irradiated and the mechanical properties of the Cu coating layer before and after irradiation were compared. As the high energy beam is irradiated onto the material of the coating layer, the dipole of the polar material rotates, and the coating layer is heated due to the intermolecular friction, thereby resulting in a heat treatment effect even in a short time. Scanning electron microscopy analysis confirmed that the surface structure was changed, and X-ray diffraction and X-ray photoelectron spectroscopy were used to confirm the crystallinity and bonding state from Cu to CuO. In addition, in the nanoindentation analysis, all improved mechanical properties were observed for martens hardness, indentation hardness and indentation modulus. It is clear that this method will be widely used in various fields in the near future to change the surface layer phase to improve mechanical properties.

키워드

CopperThin filmSputteringHigh energy irradiationMicrowave heatingNanoindentationMechanical propertiesTHIN-FILMSSURFACE FUNCTIONALIZATIONHIGH-FREQUENCYFABRICATIONNANOINDENTATIONNANOPARTICLESDYNAMICSTITANIUMSTRESSCELL
제목
Improvement of mechanical properties according to phase transformation of Cu coating layer functionalized with high energy beam
저자
Park, SuyoungKim, SangwooNa, Han GilChoi, Myung SikByoun, YoungminJin, Changhyun
DOI
10.1016/j.tsf.2020.138110
발행일
2020-09-01
유형
Article
저널명
Thin Solid Films
709