Development of DC Plasma Process for Preparing Ultrafine AlN powder

초록

Ultrafine powders of aluminum nitride were synthesized by DC plasma through vapor phase reaction in Al/N2, Al/NH3 and AlCl3/NH3 system. Equilibrium chemical composition were calculated about each system. Powders synthesized were observed to be compeletely converted and those size were measured to be about 170 nm by particle size analyzer. ..................