ScholarWorks@인하대학교

상세 보기

Vertical Platinum Etch Profile for Electrode of High-K Dielectric Materials with Cl2/Ar/C4F8 Plasma

Vertical Platinum Etch Profile for Electrode of High-K Dielectric Materials with Cl2/Ar/C4F8 Plasma
제목
Vertical Platinum Etch Profile for Electrode of High-K Dielectric Materials with Cl2/Ar/C4F8 Plasma
제목 (타언어)
Vertical Platinum Etch Profile for Electrode of High-K Dielectric Materials with Cl2/Ar/C4F8 Plasma
저자
O BEOM HOAN
학회명
AVS 51st International Symposium

ScholarWorks@인하대학교

22212 인천광역시 미추홀구 인하로 100 정석학술정보관 Tel. 032-860-9003

COPYRIGHT © 인하대학교 All Rights Reserved.

Certain data included herein are derived from the © Web of Science of Clarivate Analytics. All rights reserved.

You may not copy or re-distribute this material in whole or in part without the prior written consent of Clarivate Analytics.