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Opto-electronic properties of hydrogenated nanocrystalline Si films prepared by PECVD techniques

  • CHO NAMHEE
제목
Opto-electronic properties of hydrogenated nanocrystalline Si films prepared by PECVD techniques
저자
CHO NAMHEE
학회명
The 1st International Conference on Microelectronics and Plasma Technology
개최지
Jeju, Korea
학회 개최일
2008-08-18 ~ 2008-08-20

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