Micro Patterned Thin Film Multi Body Actuator for MEMS Magnetostrictive Transducer

제목
Micro Patterned Thin Film Multi Body Actuator for MEMS Magnetostrictive Transducer
저자
CHO CHONG DU
학회명
The 3rd International Conference on Manufacturing, Machine Design and Tribology (ICMDT 2009)
학회 개최일
2009-06-25 ~ 2009-06-26