표면탄성파 기반 화학센서의 현재, 적용 및 미래

초록

Chemical sensor can detect chemical components and eventually provide information via electrical signal conversion for process control, medical diagnosis, bioengineering, environmental contamination, safety monitoring in hazard conditions [1, 2]. There are several different types of chemical sensor according to its detection mechanism. Among them, surface acoustic wave (SAW) chemical detectors can identify and measure many chemical warfare agents (CWAs) simultaneously and are relatively inexpensive device [3]. The ability of SAW detectors to detect, identify and monitor CWAs rapidly is imperative for military and civilian usages. SAW sensors operate by detecting changes in the properties of acoustic waves as they travel at ultrasonic frequencies in piezoelectric materials. Recently, progress of SAW device based on miniaturization of sensor, fast response and improved sensitivity, humidity resistance, operating at room temperature are reviewed. For better sensitivity, some advanced sensing layer and its mechanism are under developing. This report provides a brief review of the SAW based chemical sensors and its progress including current technological developments.