Spectroscopic Ellipsometry Studies of Thin Films Prepared by Glancing Angle Deposition

초록

When thin films show columnar growth, the direction of column can be changed easily by tilting that of the incoming vapor from the source. We grew various thin films at glancing angle of incidence by magnetron sputtering and e-beam evaporation. We applied a newly-developed rotating sample and compensator spectroscopic transmission ellipsometer to measure the optical anisotropy of these films. With this instrument, the retardance over 350 to 800nm could be measured easily even for<1. We observed strong retardence from both e-beam evaporated and sputtered films. It was shown that waveplates could be fabricated with this technique ina well controllable manner