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Chemical and Mechanical Features of nc-Si:H Thin Films Prepared by PECVD under Various Electrical Substrate-Biases

  • CHO NAMHEE
제목
Chemical and Mechanical Features of nc-Si:H Thin Films Prepared by PECVD under Various Electrical Substrate-Biases
저자
CHO NAMHEE
학회명
ChinaNANO 2011
개최지
북경, 중국
학회 개최일
2011-09-07 ~ 2011-09-09

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