Kinetic Monte Carlo Study on the Clustering Effect during Carbon Co-implant for Amorphization

  • WON TAEYOUNG
제목
Kinetic Monte Carlo Study on the Clustering Effect during Carbon Co-implant for Amorphization
저자
WON TAEYOUNG
학회명
2008 International Conference on Nano Science and Nano Technology
개최지
광주
학회 개최일
2008-11-06 ~ 2008-11-07