A Design of Integrated Manufacturing System for Compound Semiconductor Fabrication

초록

Manufacturing technologies of compound semiconductor are similar to the process of memory device. Semicunductor manufacturing environment also has been emerged as mass customization and open foundry service so integrated manufacturing system is needed. In this study we design the integrated manufacturing system for compound semiconductor fabrication that has monitoring of process, reduction od lead-time, obedience of due-dates and so on. this study presents integrated manufacturing system having database system that based on web and data acquisition system. And we will implement them in the actual compound semiconductor fabrication.