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Preparation and characterization of nanostructured porous SiO2 thin films fabricated by modified oblique angle deposition

  • CHANG KWON HWANGBO
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Preparation and characterization of nanostructured porous SiO2 thin films fabricated by modified oblique angle deposition
저자
CHANG KWON HWANGBO
학회명
한국광학회 창립 20주년 기념 제 21회 정기총회 및 2010년도 동계학술발표회
개최지
KAIST 창의학습관
학회 개최일
2010-01-20 ~ 2010-01-22

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