Gaussian Pupil for Superresolution at Soft X-ray Wavelength

초록

By Using Gaussian pupil, the resolution limit can be made less than Rayligh's limit of resolution. The Gaussina form of the amplitude impulse is initially defined and by Fourier transfrom relation the pupil function is obtained and then the amplitude impulse is derived for a finite aperture. It is shown resolution limit is less than 1/2 radius of the Airy disk in the system of NA=0.5 and 130nm wavelength(soft X-ray). Also, it is shown the OTF of the annular Gaussina aperture depends only on the outer diameterof the pupil, which is a special ferature of the Gaussian pupil.