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Kinetic Monte Carlo (KMC) for Boron Profiles After Germanium Pre-amorphization

Kinetic Monte Carlo (KMC) for Boron Profiles After Germanium Pre-amorphization
  • WON TAEYOUNG
제목
Kinetic Monte Carlo (KMC) for Boron Profiles After Germanium Pre-amorphization
제목 (타언어)
Kinetic Monte Carlo (KMC) for Boron Profiles After Germanium Pre-amorphization
저자
WON TAEYOUNG
학회명
The 13th Korean Conference on Semiconductors

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