Plasma Etching Behavior of Atmospheric Plasma Sprayed Yttrium-based Coatings under NF3 Plasma

제목
Plasma Etching Behavior of Atmospheric Plasma Sprayed Yttrium-based Coatings under NF3 Plasma
저자
LEE KEE AHN
학회명
International Thermal Spray Conference 2023
학회 개최일
2023-05-22 ~ 2023-05-25