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MEMS packing을 위한 Micro PDMS pad제작
Fabrication of PDMS micro-pads for vibration absorber in MEMS packaging
초록
Micro-pads made of PDMS(polydimethylsiloane) can be mechanical shock or vibration absorber because of its contractibility. Fabrication of micro-pads and techniques of separation from substrate and attachment to new substrate are developed. Three micron thick PDMS pads were fabricated by imprinting lithography.
- 제목
- MEMS packing을 위한 Micro PDMS pad제작
- 제목 (타언어)
- Fabrication of PDMS micro-pads for vibration absorber in MEMS packaging
- 저자
- O BEOM HOAN
- 학회명
- 2008년도 대한전자공학회 하계종합학술대회