Study on Boron Diffusion with Carbon Pre-implant posterior to Amophization Process

  • WON TAEYOUNG
제목
Study on Boron Diffusion with Carbon Pre-implant posterior to Amophization Process
저자
WON TAEYOUNG
학회명
The 14th International Symposium on the Physics of Semiconductors and Applications-2008
개최지
라마다프라자 제주호텔
학회 개최일
2008-08-26 ~ 2008-08-29