Nanolinear motor with self-moving cell mechanism

초록

This research aims at the development of a linear motor capable of generating continuos linear motion from submicron to nano order resolution using multilayered piezoelectric actuators. To provide the linear motion, a new idea of self-moving cell concept is adopted, which much differs from the conventional linear motors moving motion-inchworm. The self-moving cell linear motor (SCLM) consists of a cell train and a guideway. A cell train is set up with three cells and each cell of three bows froms an oval shapes shell structure and a piezo-stack actuator inside. The cell train moves forward to backward by accumulating the induced displacements of each cell with alternating excitation signal. Basically, the motor exhibits fail-safe lock and large push/clamping force because the clamping force is maintained in the absence of electrical activation. Also, the SCLM can achieve a long travelling range with variable speed by changing activation frequency and a nano resolution by controlling the voltage of the first cell. The design, manufacturing and performance test of the SCLM are presented.