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Fabrication of microstructure by deep RIE etched Si master and PDMS mold

Fabrication of microstructure by deep RIE etched Si master and PDMS mold
  • LEE SEUNG GOL
제목
Fabrication of microstructure by deep RIE etched Si master and PDMS mold
제목 (타언어)
Fabrication of microstructure by deep RIE etched Si master and PDMS mold
저자
LEE SEUNG GOL
학회명
제13회 한국반도체학술대회

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