자유지립 및 고정지립을 적용한 머신어블 세라믹(Si3N4)의 초정밀 래핑 가공 특성에 관한 연구

초록

Machinble Ceramics have some excellent properties as the material for the mechanical components. It is, however, very diffcult to grind ceramics with high efficiency because of their high strength, hardness and Brittleness. Lapping used diamond slurry and lapping by in-process electrolytic dressing is developed to solve this problem. On this paper, a comparative study of processing ability of lapping used diamond slurry and lapping by in-process electrolytic dressing.