Enhanced dielectric properties of K0.5Na0.5NbO3-0.14SZO3 thick film by fabricating via aerosol deposition

초록

Many applications, such as petrochemical, automotive, and astronautics, have recently demanded electric devices with working high temperatures. Accordingly, the thermal stability of ceramic capacitors in electronic devices has also become important. BT (BaTiO3) has received attention as a lead-free material because it does not contain Pb and has a high energy storage density. The problem is, however, that the thermal stability is not enough compared to the higher operating temperature. The KNN (K0.5Na0.5NbO3) series is attracting attention as another alternative because of its superior temperature stability and energy storage density compared to the BT series. In this study, the aerosol deposition method (AD method) was performed by fabricating the K0.5Na0.5NbO3-0.14SZO3. The AD method has the advantage of depositing ceramic particles at room temperature by applying a heavy collision force to collide them on the substrate and making nano-grain films. KNN-SZ film was fabricated using the AD method characteristics, and higher energy storage density and thermal stability were observed than in bulk.