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Kinetic Monte Carlo Simulation of Impurity Diffusion after Silicon/Germanium Pre-amorphization Implant

  • WON TAEYOUNG
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Kinetic Monte Carlo Simulation of Impurity Diffusion after Silicon/Germanium Pre-amorphization Implant
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WON TAEYOUNG
학회명
The 5th International Conference on Advanced Materials and Devices

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