A Study on the Humidity Sensing Properties of Polyimide Film Fabricated by Electrophoretic Deposition Method

초록

Polyimide film was prepared by electrophoretic method from polyamic acid emulsion onto a metal surface of glass substrate. Process parameters affecting humidity sensing such as annealing temperature, film thickness, electrode form and electrode thickness were condsidered. The result revealed that high temperature annealing is necessary to capacitance type polyimide humidity sensor, The thickness of sensing film is one of the important factors affecting performance of the humidity sensor. From the results, the polyimide film of 1.30um thickness showed maxium 95.8pF/%RH on the region from 30%RH to 90 %RH in sensitivity and the difference between hysterisis curve at 80%RH was 2.60