Degradation of Poly(semi-perfluoroalkyl methacrylate) Thin Films under Electron-Beam Lithography Conditions

제목
Degradation of Poly(semi-perfluoroalkyl methacrylate) Thin Films under Electron-Beam Lithography Conditions
저자
LEE JINKYUN
학회명
Fluoropolymer 2018
개최지
Denver USA
학회 개최일
2018-06-24 ~ 2018-06-27