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Degradation of Poly(semi-perfluoroalkyl methacrylate) Thin Films under Electron-Beam Lithography Conditions
- 제목
- Degradation of Poly(semi-perfluoroalkyl methacrylate) Thin Films under Electron-Beam Lithography Conditions
- 저자
- LEE JINKYUN
- 학회명
- Fluoropolymer 2018
- 개최지
- Denver USA
- 학회 개최일
- 2018-06-24 ~ 2018-06-27