FEM Simulation of the Modeling Process for Thermal Nano-imprint Lithography

  • WON TAEYOUNG
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FEM Simulation of the Modeling Process for Thermal Nano-imprint Lithography
저자
WON TAEYOUNG
학회명
나노코리아 2011
개최지
KINTEX
학회 개최일
2011-08-24 ~ 2011-08-26