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초록
The new method based on restricting the scanning range was proposed for a fiber-optical confocal scanning interference microscope tomeasure a surface profile, and was experimentally certified for even the microscope with a broad axial response curve.
- 제목
- Surface Profiling with Fiber-Optical Confocal Scanning Interference Microscope Based on the Restricted Scanning Range
- 저자
- Park Dae-Yoon
- 학회명
- Technical Digest, The Pacific Rim Conference on Lasers and Electro-Optics '99