Electron-induced chemical transformation of vapor-phase synthesized hybrid resist materials for EUV and beyond EUV lithography

초록

In this study, we utilize an in situ Fourier transform infrared (FTIR) spectroscopy chamber equipped with an electron flood gun to comprehensively investigate the electron-induced chemical transformations in advanced inorganic-organic hybrid resist thin films. The characteristics of the electron gun were assessed, showing a detectable current decrease with increasing Faraday cup bias voltage, confirming that the electron energies impacting the sample were within the expected range. This unique FTIR system was applied to study two hybrid resist thin-film systems, Al-HQ and Zn-HQ, both exhibiting saturation growth characteristics at 150 degrees C. Results revealed that Al-HQ demonstrated superior electron sensitivity compared to Zn-HQ at energies <= 100 eV. Chemical changes observed were consistent with previous findings, underscoring the potential of this methodology to elucidate exposure mechanisms. This research contributes to the fundamental understanding necessary for the development of advanced resist materials for the next-generation nanolithography applications.Graphical abstractCharacterization of hybrid EUV thin film resists: Investigating material properties under low-energy electron exposure with a unique in situ FTIR system