웨이브렛 변환을 이용한 위상변이 마스크의 aerial image 고속 계산

초록

In this paper, the wavelet transform is combined with the boundary element method(BEM) in order to simulate the topological effects of phase-shifting mask efficiently. It was found that the proposed technique would be more efficient that the original BEM in viwes of the calculation speed and the usage of computer memory. Finally, the optimal desing of single trench type alternating phase-shifting mask was performed.