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Amorphous coating layers of plasma resistance by aerosol deposition

  • KIM HYUNG SUN
제목
Amorphous coating layers of plasma resistance by aerosol deposition
저자
KIM HYUNG SUN
학회명
14th International Union of Materials Research Societies International conference on Advanced Materials (IUMRS-ICAM 2015)
개최지
Jeju
학회 개최일
2015-10-25 ~ 2015-10-30

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