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초록

We report on the fabrication and characterization of multi-mode interference power splitter using sol-gel derived silica glass waveguides on fused silica substrates. The sol-gel process used provides crack-free thick films by a one-step dip or spin coating, and makes it possible to precisely select the refractive index by controlling the chemical composition of the sol solutions. The MMI power splitters were fabricated with these films and their characteristics were measured. The excess loss and the uniformity were measured 1.46 dB and 0.2 dB, respectively at 1550 nm.