Improvement of Energy Storage Density Properties of composite PZT Thick Films on Flexible Substrates Fabricated by Aerosol Deposition method

초록

To have a high energy storage density, the permittivity and dielectric breakdown voltage should be increased and the hysteresis should be reduced. This study attempts to reduce the hysteresis of PZT with high permittivity. High dense thick films(~8μm) with nano-sized grains were prepared at room temperature by AD method to reduce hysteresis. However, in the heat treatment process for improving the crystallinity, the grains were grown. So, the relaxor behavior was lost. We obtained the relaxor behavior by mixing the three different PZT compositions [PbZr0.52Ti0.48O3], [PbZr0.82Ti0.18O3], [PbZr0.18Ti0.82O3]. Grain shrinkage occurred during the heat treatment was suppressed and the relaxor behavior can be maintained. In addition, the mixture PZT films were fabricated on Si-Pt and flexible metal foil substrates. The flexible substrate relaxes the residual stress between the substrate and the film. As a result, the use of mixing and flexible substrates increased breakdown voltage and energy storage density.