Robust designed capacitive gas pressure sensor for harsh environment

초록

In this study, a gas pressure sensing device based on stainless steel diaphragm and titanium substrate for use at harsh environment is presented. To illustrate these principles, array type capacitive gas pressure sensors based on a stainless steel and titanium have been designed and fabricated. For the fabrication of the sensor, both of bulk and surface micromachined techniques are used with conventional machining fabrication. As results, characteristics of the fabricated gas pressure sensor are estimated in terms of diaphragm deflection and capacitance change by external pressure. as illustrated by the portions given in this document. ©2009 IEEE.