Three-dimensional Thermal Oxidation by Finite Element Method

초록

This paper introduces a three-dimensional mesh generator and its applications for the process simulation in INPROS(Inha Process Simulators) system. The developed mesh generator employs a new tetrahedralization algorithm and a refinement/elimination algorithm to maximize the efficiency and to minimize the calculation error. Three-dimensional thermal oxidation of the island structure was implemented by INPROS system.