ScholarWorks@인하대학교

상세 보기

Development of plasma resistance material with y-si-al-o-n oxynitride glasses

  • KIM HYUNG SUN
제목
Development of plasma resistance material with y-si-al-o-n oxynitride glasses
저자
KIM HYUNG SUN
학회명
한국 반도체 및 디스플레이 장비학회
개최지
현대성우리조트
학회 개최일
2008-05-16 ~ 2008-05-17

ScholarWorks@인하대학교

22212 인천광역시 미추홀구 인하로 100 정석학술정보관 Tel. 032-860-9003

COPYRIGHT © 인하대학교 All Rights Reserved.

Certain data included herein are derived from the © Web of Science of Clarivate Analytics. All rights reserved.

You may not copy or re-distribute this material in whole or in part without the prior written consent of Clarivate Analytics.