마이크로 공정을 이용한 압전-전자기 결합방식의 에너지 하베스터에 관한 연구

초록

A vibration-driven coupled piezoelectric-electromagnetic device is developed for energy harvesting applications. This paper presents a coupled piezoelectric-electromagnetic based energy harvester which is suitable for power generating from conventional vibration and has in providing energy for low power electronic devices. PZT cantilever has the d31 mode electrodes and inductor is fabricated on backside of wafer. PZT cantilever has a mechanical resonance frequency of 90 Hz. A power output of 18.5 μW at 0.5 g acceleration has been experimentally achieved from PZT cantilever and a power output of 6.5 μW at same conditions has been achieved from inductor. The coupled piezoelectric-electromagnetic energy harvester could be used for various applications such batteryless micro sensors and micro power generators.