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Effect of Electrical Substrate Bias on the Nanostructural and Optical Features of nc-Si:H Films Prepared by PECVD

  • CHO NAMHEE
제목
Effect of Electrical Substrate Bias on the Nanostructural and Optical Features of nc-Si:H Films Prepared by PECVD
저자
CHO NAMHEE
학회명
2010년 한국세라믹학회
개최지
제주컨벤션센터
학회 개최일
2010-10-21 ~ 2010-10-23

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