Design and control of integrated isolator featuring MR damper for ultra-precision stage

초록

In this paper, the dynamic model of ultra-precision stage is analysed and MR (magnetorheological) damper is proposed to attenuate the vibration of stage. The dynamic behaviour induced from vibration of the precision stage is important for production quality. So, the semi-active control method which offers a desirable performance without requiring large power source and space had been proposed. In order to investigate the transient vibration characteristics, the dynamic behaviour of the stage according the stage mass movements are analysed. And then, the dynamic model of ultra-precision stage is derived and its effectiveness is verified by experiment. MR damper is designed and the damping force characteristics of MR damper are analysed by experiment. After nonlinear damping force model is constructed and damping force compensator based on derived model is formulated. In order to attenuate the vibration of the ultra-precision stage, skyhook controller with compensator is designed. Vibration control performance of ultra-precision stage featuring MR damper is evaluated. © ACTUATOR 2018 - 16th International Conference and Exhibition on New Actuators and Drive Systems, Conference Proceedings.

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