Flexible transparent oxide electrode on regenerated cellulose

초록

Flexible transparent conducting oxides (TCOs) are requested for optoelectronic applications such as touch panels, flat panel display, organic light-emitting diode (OLED) and other mobile devices. To achieve the flexibility of TCO, amorphous ZnO doped ITO (ZITO) films were studied as flexible TCO electrode deposited using a single target (In2O3 50.7/ ZnO 44.4/ SnO2 4.9 mol %) on flexible transparent cellulose, PES and glass substrates by a sputtering system. As the oxygen ratio increases during the ZITO film deposition, sheet resistance also linearly increases while the carrier density decreases, which may stem from the rough surface of cellulose by regeneration film process. The overall electrical performance of ZITO is comparable to other transparent substrates.