Fabrication of metal patterns on PET by conformal contact method

  • LEE SEUNG GOL

초록

Fabrication of metal lines and patterns has been done by conventional photolithography and etching. Recently, nano-imprint lithography(NIL) has been applied for micro and nano patterning and various methods have been proposed such as metal transfer printing, soft lithography, micro-contact printing.

제목
Fabrication of metal patterns on PET by conformal contact method
저자
LEE SEUNG GOL
학회명
38th International Conference on Micro and Nano Engineering
개최지
Toulouse
학회 개최일
2012-09-16 ~ 2012-09-20