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초록
Fabrication of metal lines and patterns has been done by conventional photolithography and etching. Recently, nano-imprint lithography(NIL) has been applied for micro and nano patterning and various methods have been proposed such as metal transfer printing, soft lithography, micro-contact printing.
- 제목
- Fabrication of metal patterns on PET by conformal contact method
- 저자
- LEE SEUNG GOL
- 학회명
- 38th International Conference on Micro and Nano Engineering
- 개최지
- Toulouse
- 학회 개최일
- 2012-09-16 ~ 2012-09-20