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Effect of AlN buffer layer deposition temperature on the characteristics of AlN epilayers on Si (111)

  • KIM HYUNG SUN
제목
Effect of AlN buffer layer deposition temperature on the characteristics of AlN epilayers on Si (111)
저자
KIM HYUNG SUN
학회명
17th International Conference on Metalorganic Vaper Phase Epitaxy (ICMOVPE)
학회 개최일
2014-07-13 ~ 2014-07-18

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