A Full-Wave Analysis for Multi-Level Interconnects Using FDTD-PML Method

초록

FDTD(finite difference time domain) method is a 3-D full-wave numerical algorithm for solving various electromagnetic phenomena and interaction problems. PML(perfectly matched layer) method is very efficient for absorbing the electromagnetic waves and then for solving unbounded problems. This paper deals with the application of FDTD-PML technique to the solution of wave-structure interaction problems. It is shown that the excited Gaussian pulses were propagated along the multi-level interconnect metal line as the increase of time and the interaction phenomena occurred. The absorbing effectiveness of PML as a function of the time step is also demonstrated.