진공증착중합법에 의해 제조된 폴리이미드 박막의 습도감지 특성에 관한 연구

초록

The study of this paper is to establish the optimum fabricating condition of specimens using vapor deposition polymerization method which belongs to a mode of preparation of functional thin films with dry process and to develop thin film type humidity sensor which has good humidity sensitive characteristics. Scanning electron microscopy, Atomic force microscopy were used to analyse the characteristics of thin film and the basic structure of the humidity sensor is a parallel capacitor which consists of three layers of Al/PI/Al. the characteristics of fabricated samples were measured under various conditions, and obtained linear characteristics in the range of 20∼80%RH, independent of temperature change, and low hysteresis characteristics.