디지틀형 유량제어기의 설계 및 실현

초록

In this paper, we propose the design and implementation of a mass flow controller(MFC) based on digital type. The digital type of MFC combined with analog and digital circuit has the advantage of various functions compared to a conventional analog type of MFC. The MFC designed in the paper consists of a sensor, actuator and controller using microprocessor and a control algorithm for the digital type of MFC. The experimental result of the proposed MFC implemented in this paper is evaluated via real-time experiments, which show that flow rate is controlled in 3 seconds.