Modified Glancing Angle Deposition for Making Nanostructured High Porous SiO2 Thin Films

  • CHANG KWON HWANGBO
제목
Modified Glancing Angle Deposition for Making Nanostructured High Porous SiO2 Thin Films
저자
CHANG KWON HWANGBO
학회명
AVS 56th International Symposium & Exhibition
개최지
San Jose
학회 개최일
2009-11-08 ~ 2009-11-13