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초록

The methastable state diamond films have been deposited on Si substrates using MWPCVD. Effects of each experimental parameters of MWPCVD including CH4 concentrations. Oxygen additions. Operating pressure, etc. on the growth rate and crystallinity were invesitigated. The best crystallinity of the film at 3% methane concentration addition of oxygen to the CH4-H2O mixture gave an improved film crystallinity at 50% oxygen concentration. Upon increasing the operating pressure. the growth rate and crystallinit were increased simultaneously.