Three-Dimensional Simualtion of Anisotropic Wet Chemical Etching Process

Three-Dimensional Simualtion of Anisotropic Wet Chemical Etching Process
  • WON TAEYOUNG
제목
Three-Dimensional Simualtion of Anisotropic Wet Chemical Etching Process
제목 (타언어)
Three-Dimensional Simualtion of Anisotropic Wet Chemical Etching Process
저자
WON TAEYOUNG
학회명
The 13th Korean Conference on Semiconductors